According to theoretical analysis and numerical simulation, the influence of the incident laser and the super-resolution layer on traditional readout signal and differential readout signal are both discussed, the crosstalk are also compared for the two readout signals. 通过理论分析和模拟仿真,深入分析了光束尺寸、超分辨掩膜层参数等对读出信号的影响,重点进行了信号串扰在差分读出和的对比分析。